JPH0516082B2 - - Google Patents
Info
- Publication number
- JPH0516082B2 JPH0516082B2 JP8294687A JP8294687A JPH0516082B2 JP H0516082 B2 JPH0516082 B2 JP H0516082B2 JP 8294687 A JP8294687 A JP 8294687A JP 8294687 A JP8294687 A JP 8294687A JP H0516082 B2 JPH0516082 B2 JP H0516082B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- sputtering
- magnetic
- substrate
- gap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010409 thin film Substances 0.000 claims description 55
- 230000005291 magnetic effect Effects 0.000 claims description 38
- 239000000758 substrate Substances 0.000 claims description 36
- 239000002184 metal Substances 0.000 claims description 29
- 238000004544 sputter deposition Methods 0.000 claims description 28
- 238000004519 manufacturing process Methods 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 7
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 239000010408 film Substances 0.000 description 14
- 230000005294 ferromagnetic effect Effects 0.000 description 10
- 238000004804 winding Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 229910000702 sendust Inorganic materials 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 230000005596 ionic collisions Effects 0.000 description 1
- 210000001503 joint Anatomy 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 230000008685 targeting Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8294687A JPS63249918A (ja) | 1987-04-06 | 1987-04-06 | 磁気ヘッドの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8294687A JPS63249918A (ja) | 1987-04-06 | 1987-04-06 | 磁気ヘッドの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63249918A JPS63249918A (ja) | 1988-10-17 |
| JPH0516082B2 true JPH0516082B2 (en]) | 1993-03-03 |
Family
ID=13788384
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8294687A Granted JPS63249918A (ja) | 1987-04-06 | 1987-04-06 | 磁気ヘッドの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63249918A (en]) |
-
1987
- 1987-04-06 JP JP8294687A patent/JPS63249918A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63249918A (ja) | 1988-10-17 |
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